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Domestic gas mass flow controller has fully entered the integrated circuit industry

February 25, 2023
[China Instrument Network Instrument R&D] On March 30th, a 16-person SMIC audit team conducted a review of Qixing Electronic Gas Mass Flow Controller. Qixing electronic gas mass flow controller products have been tested and purchased in batches by SMIC, China Micro, North Micro and other companies, marking that Qixing electronic gas mass flow controller products have fully entered the high-end industries such as integrated circuits, breaking this The long-term occupation of imported goods in a field.

In normal operation, the mass flow controller generates a force on the tube wall when the fluid flows in the rotating tube. It was discovered by Coriolis in 1832 when the turbine was studied, or Coriolis force. The mass flowmeter is based on Coriolis force. Inside the sensor there are two parallel T-shaped vibrating tubes. The middle part is equipped with drive coils. The two ends are equipped with vibrating coils. The excitation voltage provided by the transmitter is added to the drive coil. The vibrating tube oscillates in a reciprocating cycle. The fluid medium in the industrial process flows through the vibrating tube of the sensor, and a Coriolis force effect is generated on the vibrating tube, so that the two vibrating tubes are torsionally vibrated, and the vibrating coils installed at both ends of the vibrating tube will Two sets of signals with different phases are generated, and the difference between these two signals is proportional to the mass flow of fluid flowing through the sensor. The computer calculates the mass flow through the vibrator. When different media flow through the sensor, the main vibration frequency of the vibrating tube is different, and the medium density is calculated accordingly. A platinum resistor mounted on the sensor tube can indirectly measure the temperature of the medium.

At present, it is mainly used for boiler and cracking furnace fuel gas mass flow measurement control; petrochemical, oil production, torch gas mass flow measurement; instrument air, process air, nitrogen and other mass flow measurement.

At the kick-off meeting, Tang Fei, the deputy general manager of Seven Stars Electronics, introduced the latest developments of Qixing Electronics to the visiting guests. The head of the SMIC team expressed appreciation for the achievements of Seven Star Electronics and stated that Seven Stars Electronics is a very good partner and hopes to Qixing Electronics will upgrade the technical level of its equipment and core components.

SMIC’s supplier audit team visited the Seven Star Electronic MFC R&D Center.

At present, SMIC has grown into the largest and most technologically advanced level in mainland China and the fourth-ranked wafer foundry in the world, driving the development of upstream and downstream technologies in the industry chain. The company advocates the use of equipment from domestic manufacturers. With the continuous evolution of SMIC's technology, the technical capabilities of the equipment plant have been significantly improved. Seven Star Electronics, as a supplier of equipment and flow meter core components, shares the rapid rise of China Semiconductor with SMIC. Responsibility to realize the Chinese dream of the semiconductor industry.
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