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China's high-performance sensor integrated circuit achieved a breakthrough

March 04, 2023

A recent paper by Nanjing Institute of Technology on physical sensors was published in the top international journal, Microelectronics and Integrated Circuits, IEEE JOURNAL OF SOLID-STATE CIRCUITS (JSSC). The research results show that our country has achieved a breakthrough development in MEMS inertial sensor ASIC design.

In modern life, MEMS inertial sensors are incorporated into smartphones, car navigation systems, game consoles, digital cameras, music players, wireless mice, hard disk protectors, smart toys, pedometers, anti-theft systems and the like, Mm or less, but it is an important part to solve the navigation, positioning, orientation and movement attitude measurement.

In September 2015, the IEEE JOURNAL OF SOLID-STATE CIRCUITS (JSSC), a top international journal in the field of microelectronics and integrated circuits, published a research paper entitled "A Sub-g Bias-Instability MEMS Oscillating Accelerometer With an Ultra -Low-Noise Read-Out Circuit in CMOS ", which is the first time in the journal published physical sensor article. The research results were published in JSSC, showing that Polytechnic has made a breakthrough in MEMS inertial sensor ASIC design. The research results can greatly improve the stability of the sensor (accuracy), the sensor using the circuit, the performance has reached the advanced level at home and abroad have been reported.

Professor Su Yan, head of the MEMS team, said that inertial sensors are sensors that detect and measure acceleration, tilt, impact, vibration, rotation and multi-degree-of-freedom (DoF) motion. An inertial system consisting of an accelerometer and a gyroscope enables real-time monitoring of carrier position and motion information. Inertial sensors fabricated using MEMS technology are typically only a few millimeters or less in size for sensitive structures; an application specific integrated circuit (ASIC) is an integrated circuit made for a specific user or a specific electronic system that integrates thousands of transistor circuits Chip, also has the characteristics of small size. Both can be mass-produced at very low cost.

As a result, application specific integrated circuit (ASIC) technology and MEMS technology will greatly reduce the cost, size and power consumption of inertial sensors, making this type of sensor widely used in consumer electronics products. In addition, the use of high-performance ASIC (ASIC), but also reduce the environmental factors and parasitic parameters on the sensor performance, greatly improve the MEMS inertial sensor accuracy, making the type of sensor can be used in high-precision navigation guidance field, can To contribute to the development of national defense science and technology.

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